This page lists the raw data about RTA and Oxidation Furnaces, broken down into the individual sources from which the data has been assimilated. You will probably find it useful to "search in page" (usually CTRL+F).
Data from James Watt Nanofabrication Centre, University of Glasgow:
→ rdf:type → photonics:Capability
→ rdfs:label → “RTA and Oxidation Furnaces”