Wet Benches at Optoelectronics Research Centre, University of Southampton


w: http://www.orc.soton.ac.uk/integratedcleanroom.html

Used mainly for cleaning and etching a wide range of materials using acids such as hydrofluoric acid, fuming nitric acid, sulphuric acid, hydrochloric acid and acetic acid, mixtures such as _piranhਠand etchants for gold, chromium, titanium, aluminium, silica and silicon (KOH).

Hosted by: Optoelectronics Research Centre, University of Southampton.

Contact: Ea07ce06300705be4690971cf0e3a3de5eb26e95.

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