S4700 at James Watt Nanofabrication Centre, University of Glasgow


w: http://www.jwnc.gla.ac.uk/sems.html

Field emission electron source. 1.5 nm image resolution at 15 keV. Substrates up to 150 mm diameter. Accelerating voltages from 0.5 to 30 keV in 100 eV steps. Eucentric 5 axis motorised stage. Turbomolecular pumped column and sample chamber. High resolution back scattered detector. CD measurement and EDX analysis tools

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

Manufacturer: Hitachi.

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