NIL 2.5 Nanoimprinter at James Watt Nanofabrication Centre, University of Glasgow


w: http://www.jwnc.gla.ac.uk/nanoimprint.html

We have over 20 years experience of nanoimprint lithography, first using a manual press before commercial tools became available. We now have an Obducat tool which allows samples up to 65 mm to be processed. The system has demonstrated features down to 20 nm and has a 250 oC stage and pneumatic press that can operate up to 70 bar (but normally used at 20 bar). We have significant experience making stamps for the nanoimprinter and Kelvin Nanotechnology also offer stamps up to 200 mm diameter as a commercial service.

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

Manufacturer: Obducat.

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