Interchangable targets with Ni, Pt, Al, NiCr, Au, Ge, Ti, TaN metals. Suitable for samples up to 100 mm. Turbo pumped load lock and main chamber. 6 magnetron height adjustable cathodes each with screen and pneumatic shutter. Substrate double planetary motion. 3 off 1.5 kW DC and 3 off 1.0 kW rf power supplies with simultaneous operation. Ar, O2 and N2 gas lines with mass flow controllers. Full computer control.