MEB 450 Electron Beam Evaporator at James Watt Nanofabrication Centre, University of Glasgow


w: http://www.jwnc.gla.ac.uk/metal.html

Six crucibles with Pd, NiCr, Au, Ge, Ti, Ni metals. Suitable for samples up to 75 mm. Diffusion pumped main chamber. 10 kW electron beam source. Load lock chamber. Plasma system for substrate cleaning. Full computer control.

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

Manufacturer: Plassys.

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