MEB 400S Electron Beam Evaporator at James Watt Nanofabrication Centre, University of Glasgow


w: http://www.jwnc.gla.ac.uk/metal.html

Eight 12cc crucibles with Ni, Pt, Al, NiCr, Au, Ge, Ti, Au metals. Suitable for samples up to 100 mm. Cryo pumped load lock and main chamber. 10 kW electron beam source. Substrate double planetary motion. Full computer control.

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

Manufacturer: Plassys.

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