KLA Tencor P-16 Stylus Profiler at Optoelectronics Research Centre, University of Southampton


w: http://www.orc.soton.ac.uk/integratedcleanroom.html

For 3D mapping of surface morphology of devices, for example to measure the depth of an etched structure or the thickness of a thin film. Brief specifications are vertical range of 300_m over a maximum horizontal scan length of 80mm with height resolution of about 1nm. 2_m diameter stylus tip with forces between 1 mg and 50 mg. Surface roughness, waviness and stress measurement.

Hosted by: Optoelectronics Research Centre, University of Southampton.

Contact: Ea07ce06300705be4690971cf0e3a3de5eb26e95.

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