KLA Tencor P-16 Stylus Profiler at Centre for Innovative Manufacturing in Photonics, University of Southampton


w: http://www.cimp.soton.ac.uk/integrated.html

For 3D mapping of surface morphology of devices, for example to measure the depth of an etched structure or the thickness of a thin film. Brief specifications are vertical range of 300_m over a maximum horizontal scan length of 80mm with height resolution of about 1nm. 2_m diameter stylus tip with forces between 1 mg and 50 mg. Surface roughness, waviness and stress measurement.

Hosted by: Centre for Innovative Manufacturing in Photonics, University of Southampton.

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