High Purity Tube Furnaces at Optoelectronics Research Centre, University of Southampton

w: http://www.orc.soton.ac.uk/integratedcleanroom.html

Wide range of horizontal and vertical tube furnaces, chamber furnaces, high and low temperature ovens, vacuum processing. Processing in dry nitrogen, argon, oxygen, SF6, hydrogen and hydrogen sulphide. Speciality heating including rapid thermal annealing and RF induction

Hosted by: Optoelectronics Research Centre, University of Southampton.

Contact: Ea07ce06300705be4690971cf0e3a3de5eb26e95.

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