FEI Nova NanoSEM 630 at James Watt Nanofabrication Centre, University of Glasgow


w: http://www.jwnc.gla.ac.uk/sems.html

Schottky field emitter with up to 100 nA. 150 mm x 150 mm piezo driven stage. substrates up to 200mm can be loaded. ultra high resolution imaging under high and low vacuum. High vacuum 1.0 nm @ 15kV and Low Vacuum 1.8 nm @ 3kV. Non conducting substrates can be imaged without coatings. Electrostatic beam blanker and ebl capability. Several detectors including TLD, ETD, Helix, VCD, GAD. Integrated CCD in chamber camera.

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

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