Schottky field emitter with up to 100 nA. 150 mm x 150 mm piezo driven stage. substrates up to 200mm can be loaded. ultra high resolution imaging under high and low vacuum. High vacuum 1.0 nm @ 15kV and Low Vacuum 1.8 nm @ 3kV. Non conducting substrates can be imaged without coatings. Electrostatic beam blanker and ebl capability. Several detectors including TLD, ETD, Helix, VCD, GAD. Integrated CCD in chamber camera.