Dektak 6M Heigh Profiler at James Watt Nanofabrication Centre, University of Glasgow


w: http://www.jwnc.gla.ac.uk/metrology.html

Substrates up to 150 mm diameter. Vertical resolution 0.1 nm at 6.5 k(nm) range. Stylus force from 1 mg to 15 mg. Stylus tip radius of 12.5 'm and 2.5 'm. Z height capability of 1 mm. x-y stage translation of 20 mm x 80 mm. Up to 30,000 data points per scan.

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

Manufacturer: Veeco.

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