Nanofabrication at James Watt Nanofabrication Centre, University of Glasgow

w: http://www.jwnc.gla.ac.uk/nanofabrication.html

The University of Glasgow has 30 years experience of nanofabrication and is one of the few places in the world that can undertake sub-10 nm electron beam lithography and sub-5nm single line nanolithography across substrates with dimensions up to 200 mm. We have propriotary layer-to-layer alignment techniques that can deliver 0.46 nm rms alignment allow reproducible gaps between layers of 1 nm. Our experience also enables fully integrated devices and circuits along with 3D lithographic patterned at the nanoscale.

Hosted by: James Watt Nanofabrication Centre, University of Glasgow.

view sources